Yingli Ha 1,2,3†Yu Luo 1,2,3†Mingbo Pu 1,2,3,4,*Fei Zhang 1,2,3[ ... ]Xiangang Luo 1,2,3,4,**
Author Affiliations
Abstract
1 National Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu 610209, China
2 State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
3 Research Center on Vector Optical Fields, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
4 School of Optoelectronics, University of Chinese Academy of Sciences, Beijing 100049, China
5 Tianfu Xinglong Lake Laboratory, Chengdu 610299, China
Metalenses have gained significant attention and have been widely utilized in optical systems for focusing and imaging, owing to their lightweight, high-integration, and exceptional-flexibility capabilities. Traditional design methods neglect the coupling effect between adjacent meta-atoms, thus harming the practical performance of meta-devices. The existing physical/data-driven optimization algorithms can solve the above problems, but bring significant time costs or require a large number of data-sets. Here, we propose a physics-data-driven method employing an “intelligent optimizer” that enables us to adaptively modify the sizes of the meta-atom according to the sizes of its surrounding ones. The implementation of such a scheme effectively mitigates the undesired impact of local lattice coupling, and the proposed network model works well on thousands of data-sets with a validation loss of 3×10?3. Based on the “intelligent optimizer”, a 1-cm-diameter metalens is designed within 3 hours, and the experimental results show that the 1-mm-diameter metalens has a relative focusing efficiency of 93.4% (compared to the ideal focusing efficiency) and a Strehl ratio of 0.94. Compared to previous inverse design method, our method significantly boosts designing efficiency with five orders of magnitude reduction in time. More generally, it may set a new paradigm for devising large-aperture meta-devices.
intelligence method physics-data-driven method inverse design large-aperture metalenses 
Opto-Electronic Advances
2023, 6(11): 230133
作者单位
摘要
西安理工大学机械与精密仪器工程学院,陕西 西安 710048
普通靶标用于相机标定时需要保证其在各角度成像的完整,靶标占相机视场比例较小,相机标定精度低,且变焦测量中相机视场改变,标定精度进一步降低。理论分析了单应矩阵的特点,发现从各角度拍摄的靶标图片中靶点不完全相同,这不影响单应矩阵的计算和相机标定。结合仿真分析,设计了一种定向分层靶标,第一层设计定向标志点,靶点向外层逐渐增大,针对不同的视场采用不同范围的层,靶点在视场中所占比例一直较大,确保相机标定精度。提出基于共线原理和射影变换结合的靶点匹配方法,只要靶标的定向特征点出现在图片中,即能实现靶点识别与匹配,进而提高靶标使用的灵活性和相机标定效率。实验结果表明,定向分层靶标的靶点识别与匹配方法准确有效,不受靶标部分靶点缺失的影响;使用该靶标可以提高相机标定精度,且标定精度不受相机视场改变的影响。
测量 相机视场 单应矩阵 定向分层靶标 共线原理 靶点匹配 
光学学报
2022, 42(16): 1612004
作者单位
摘要
西安理工大学机械与精密仪器工程学院,陕西 西安 710048
精确高效获得可移动文物的三维数字档案及外形参数对于可移动文物的保护与研究有重要意义。在多视图几何三维重建中,针对匹配点占比对重建精度与效率的影响展开研究,得出匹配点占比约为50%时可实现精确高效重建,该结论可有效指导基于多视图几何三维重建的图像序列的采集。针对重建产生的噪声,在HSV颜色特征空间中滤除点云噪声,利用基于标准差阈值的检测算法去除离群点,有效提高了三维重建的精度和视觉效果。在三维重建后,采用有向包围盒算法计算可移动文物外形参数,采用基于点云疏密程度的加权主成分分析法(PCA)计算包围盒的主方向。采用所提方法测量的仿元代瓷制花瓶,外形参数的重复性标准差小于0.15 mm,最大测量误差小于0.25 mm,高于可移动文物保护与研究中对外形参数的测量要求。
测量 运动恢复结构 精确高效三维重建 点云去噪 有向包围盒 
激光与光电子学进展
2022, 59(12): 1212001
Author Affiliations
Abstract
1 State Key Laboratory of Information Photonics and Optical Communications, and School of Information and Communication Engineering, Beijing University of Posts and Telecommunications, Beijing 100876, China
2 State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China
3 Frontiers Science Center for Nano-Optoelectronics & Collaborative Innovation Center of Quantum Matter, Beijing 100871, China
4 Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
5 Beijing Academy of Quantum Information Sciences, Beijing 100193, China
Integrated circuit (IC) industry has fully considered the fact that the Moore’s Law is slowing down or ending. Alternative solutions are highly and urgently desired to break the physical size limits in the More-than-Moore era. Integrated silicon photonics technology exhibits distinguished potential to achieve faster operation speed, less power dissipation, and lower cost in IC industry, because their COMS compatibility, fast response, and high monolithic integration capability. Particularly, compared with other on-chip resonators (e.g. microrings, 2D photonic crystal cavities) silicon-on-insulator (SOI)-based photonic crystal nanobeam cavity (PCNC) has emerged as a promising platform for on-chip integration, due to their attractive properties of ultra-high Q/V, ultra-compact footprints and convenient integration with silicon bus-waveguides. In this paper, we present a comprehensive review on recent progress of on-chip PCNC devices for lasing, modulation, switching/filting and label-free sensing, etc.
Journal of Semiconductors
2021, 42(2): 023103
作者单位
摘要
北京工业大学激光工程研究院, 北京 100124
介绍了采用CO2激光器对聚甲基丙烯酸甲脂(PMMA)板进行刻蚀制备微流道的工艺实验。通过实验分析工艺参数对微流道深度和宽度的影响及其中变化规律。结果表明,激光线能量密度与刻蚀微流道宽度两者关系呈指数增长,得到了线能量密度和微流道宽度的数学拟合公式,曲线和数据点拟合决定系数R2=0.96。当线能量密度小于300 J/m时,微流道深度与线能量密度呈近似线性关系;当线能量密度大于300 J/m时,偏离线性关系。通过理论计算得到在低线能量密度下微流道深度的变化曲线图,并与实际测量值吻合较好。最后,通过优化工艺参数,制备出微流道宽度为170 μm,深度为180 μm的生物芯片。
激光刻蚀 聚甲基丙烯酸甲脂 CO2激光 微流道 深度模型 
激光与光电子学进展
2011, 48(4): 041401
作者单位
摘要
北京工业大学激光工程研究院, 北京 100124
目前激光直写膜电阻时,所加入的辅料容易造成杂质污染,膜的厚度和粗糙度难以降低。为减少杂质污染,降低膜厚和表面粗糙度,改善激光直写微电路性能,进行了透射式激光直写金属薄膜电阻的实验研究,分析了薄膜线宽与激光光斑能量分布特点的关系,获得了线宽低于光斑直径的导电薄膜。实验表明,扫描速度的增加或离焦量的降低会导致光斑重叠率和导线宽度减小。同时,过高的功率会使薄膜受到烧蚀破坏,功率过低则难以将靶材充分熔化附着在玻璃基板上。相比之下,锌膜颗粒尺寸较为均匀,而Al /Zn混合膜的颗粒尺寸不一致。
激光技术 薄膜导线 微电路 激光直写 金属粉末 
中国激光
2010, 37(12): 3196
作者单位
摘要
北京工业大学激光工程研究院, 北京 100124
探索了一种新的微透镜阵列制作工艺,使用二氧化碳激光在聚甲基丙烯酸甲酯(PMMA)表面进行选区刻蚀,研制出表面光洁、尺寸和曲率可控的微透镜阵列,并研究了其成形机理和加工特点。PMMA表面受激光照射区域被汽化蒸发,熔融PMMA在液面张力的作用下,凝固后与未扫描区域形成弧形边缘,当圆形未扫描区域表面被完全熔化后整个液面呈球状凸起,冷凝后形成透镜。透镜曲率半径随单位面积输入能量增加而减小。含有杂质较多或表面清洁度不达标的PMMA在激光照射下发生反应产生气泡和坏点,导致透镜质量降低。
激光加工 光学器件 透镜阵列 选区刻蚀 曲率半径 
光学学报
2010, 30(s1): s100104
Author Affiliations
Abstract
Optical Storage Laboratory, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 2018002 School of Information Science and Technology, East China Normal University, Shanghai 200241
Field enhancement effect of metal probe in evanescent field, induced by using a multi-layers structure for exciting surface plasmon resonance (SPR), is analyzed numerically by utilizing two-dimensional (2D) TM-wave finite difference time-domain (FDTD) method. In this letter, we used a fundamental mode Gaussian beam to induce evanescent field, and calculated the electric intensity. The results show that compared with the nonmetal probe, the metal probe has a larger field enhancement effect, and its scattering wave induced by field enhancement has a bigger decay coefficient. The field enhancement effect should conclude that the metal probe has an important application in nanolithography.
260.3910 Metal optics 240.6680 Surface plasmons 000.4430 Numerical approximation and analysis 
Chinese Optics Letters
2009, 7(1): 0174
作者单位
摘要
1 中国科学院上海光学精密机械研究所, 上海 201800
2 华东师范大学信息科学技术学院, 上海 200241
提出了一种在原子力显微镜(AFM)基础上设计的探针诱导表面等离子体共振纳米光刻(PSPRN)系统。此系统不但实现了探针的精确控制,而且由于系统本身具有AFM的全部功能,因此可以实时检测样品表面的形貌以及光刻效果。系统采用改进的Kretschmann型共振耦合器件,在棱镜和样品基板之间注入匹配折射率油,使样品更方便更换;利用声光调制器与AFM配合实现了等离子体激发光照射时间的精确控制。通过初步实验,在银(Ag)膜表面获得了直径100 nm左右的光刻点,验证了PSPRN的可行性。研究了光照时间、激光功率、激光入射角、材料厚度等因素对光刻点大小、深度的影响,为实现更小的光刻点提供了参考。
光刻 表面等离子体共振 原子力显微镜 探针 
光学学报
2009, 29(2): 473

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